Pressure measuring membrane with resonant element vibrating orth

Measuring and testing – Fluid pressure gauge – Vibration type

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310338, G01L 1100

Patent

active

059692570

ABSTRACT:
An improved device for measuring pressures, comprising a silicon membrane or diaphragm which is exposed, on its two faces, to two pressures whose difference is to be measured. A resonant element is provided on one face of the diaphragm, which is treated by selective chemical etching, and is mechanically coupled to the diaphragm so that its resonance frequency varies as a consequence of the deformation undergone by the diaphragm.

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Tokuji Saigusa et al: "Intelligent Differential Pressure Transmitter Using Micro-Resonators" Signal Processing and Systems Control, Intelligent Sensors and Instrumentation, San Diego, Nov. 9-13, 1992, vol. vol. 3, No. Conf. 18, Sep. 11, 1992, pag. 1634-39, XP000378729 Institute of Electrical and Electronics Engineers * the whole document *.

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