Measuring and testing – Fluid pressure gauge – Vibration type
Patent
1997-10-29
1999-10-19
Felber, Joseph L.
Measuring and testing
Fluid pressure gauge
Vibration type
310338, G01L 1100
Patent
active
059692570
ABSTRACT:
An improved device for measuring pressures, comprising a silicon membrane or diaphragm which is exposed, on its two faces, to two pressures whose difference is to be measured. A resonant element is provided on one face of the diaphragm, which is treated by selective chemical etching, and is mechanically coupled to the diaphragm so that its resonance frequency varies as a consequence of the deformation undergone by the diaphragm.
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Tokuji Saigusa et al: "Intelligent Differential Pressure Transmitter Using Micro-Resonators" Signal Processing and Systems Control, Intelligent Sensors and Instrumentation, San Diego, Nov. 9-13, 1992, vol. vol. 3, No. Conf. 18, Sep. 11, 1992, pag. 1634-39, XP000378729 Institute of Electrical and Electronics Engineers * the whole document *.
ABB Kent Taylor S.p.A.
Consorzio Abb Per Lo Sviluppo Tecnologico
Felber Joseph L.
Josif Albert
Modiano Guido
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