Pressure measuring element

Details Pressure measuring element Pressure measuring element

1986-06-30

1987-12-08

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73718, 73724, 73726, 361283, G01L 708, G01L 912, G01L 1904

Patent

active

047111305

ABSTRACT:
A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is positioned inside the membrane. A heating resistor element is positioned on the underside of the substrate, which maintains the temperature of the substrate constant. A temperature sensor is also arrayed on the upper side of the substrate near the membrane.

REFERENCES:
patent: 4198868 (1980-04-01), Runyan
patent: 4481497 (1984-11-01), Kurtz et al.

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