Pressure measuring device for vacuum systems

Details Pressure measuring device for vacuum systems Pressure measuring device for vacuum systems

2007-02-20

2007-02-20

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S716000, C073S753000

Reexamination Certificate

active

11115891

ABSTRACT:
A pressure-measuring device is configured for use in vacuum systems, which are used for surface coating or modification of objects and/or substrates in an inner receptacle inside a processing chamber. Elastic elements or portions are fabricated in the inner receptacle. The pressure-measuring device includes distance-measuring elements designed to measure the deformation of the elastic elements of the inner receptacle. The deformation measurements are related to the pressure in the inner receptacle. The pressure-measuring device provides a continuous and secure determination of the pressure.

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