Pressure-measuring cell

Details Pressure-measuring cell Pressure-measuring cell

2006-12-22

2011-10-11

Allen, Andre (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S725000

Reexamination Certificate

active

08033178

ABSTRACT:
A pressure sensor comprises a sensor platform; a measuring membrane, or diaphragm, which is held by the sensor platform, and can have a pressure applied to it and is deformable as a function of pressure; and at least two resistance elements having an AlxGa1—xN layer. At least a first resistance element of the at least two resistance elements is arranged on the measuring membrane, or diaphragm and has a deformation-dependent resistance value. The pressure sensor can be operated using a measurement circuit to register a signal which depends on the resistance values of the at least two resistance elements in the plane of the AlxGa1—xN layer. Four resistance elements are preferably provided in a full bridge.

REFERENCES:
patent: 2002/0066319 (2002-06-01), Beach
patent: WO 2004/083110 (2004-09-01), None

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