Pressure-measuring arrangement with high linearity

Details Pressure-measuring arrangement with high linearity Pressure-measuring arrangement with high linearity

1994-06-01

1995-08-29

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

361281, G01L 912, H01G 700, H01G 706

Patent

active

054450314

ABSTRACT:
A pressure-measuring arrangement has a pressure-sensor structure with a diaphragm whose pressure-dependent deflection is measurable capacitively by means of a first electrode (=measuring electrode) disposed on the diaphragm and forming a measuring capacitance, C.sub.s, together with a fixed counter-electrode. A second electrode forming a second pressure-dependent capacitance, C.sub.f, together with the counter-electrode is implemented and disposed on the diaphragm. A third electrode forms a constant reference capacitance, C.sub.r, together with the fixed counter-electrode. An evaluating circuit derives the pressure by a capacitance measurement and has the following transfer function:

REFERENCES:
patent: 4227419 (1980-10-01), Park
patent: 4422335 (1983-12-01), Ohnesorge et al.
patent: 4542436 (1985-09-01), Carusillo
patent: 4743836 (1988-05-01), Grzybowski et al.
patent: 4977480 (1990-12-01), Nishihara
patent: 5020377 (1991-06-01), Park
Schoeneberg et al., "A CMOS-Readout-Amplifier For Instrumentation Applications", ESSCIRC90, pp. 208-211, 1990.

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