Pressure measurement using a MEMS device

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system

Reexamination Certificate

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Reexamination Certificate

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07860668

ABSTRACT:
A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and indicative of the ambient pressure about the device.

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