Fluid handling – Line condition change responsive valves – Direct response valves
Patent
1997-09-09
2000-03-21
Lee, Kevin
Fluid handling
Line condition change responsive valves
Direct response valves
137511, 251 636, F16K 1518, F16K 31122
Patent
active
060390743
ABSTRACT:
A pressure-induced shut-off valve for a liquid delivery system with a back pressure regulator having a positive shut-off capability is provided. The pressure-induced shut-off valve may incorporate an integrated purge valve or an integrated cross flow nebulizer/vaporizer. The pressure-induced shut-off valve functions as a variable flow restrictor which automatically adjusts itself to provide a constant back pressure in the liquid line.
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patent: 5755428 (1998-05-01), Ollivier
Burkhart Chris W.
Christensen David
Raaijmakers Ivo J.
Susoeff Michael N.
Lee Kevin
Novellus Systems Inc.
Steuber David E.
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