Pressure gauge for semi-conductor processing

Details Pressure gauge for semi-conductor processing Pressure gauge for semi-conductor processing

1996-01-16

1997-01-07

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Bourdon

73741, G01L 704

Patent

active

055919189

ABSTRACT:
A pressure gauge for semiconductor processing that defines an internal flow path from the socket inlet to the displaceable end of the Bourdon tube that is shelf free so as to be self drainable for internal cleansing and purging whereby to avoid any trapping of contaminants that could subsequently have a deleterious affect on the process.

REFERENCES:
patent: 1345630 (1920-07-01), Place
patent: 2181730 (1939-11-01), Heise
patent: 3398584 (1968-08-01), Heise
patent: 3975967 (1976-08-01), Conti
patent: 4055085 (1977-10-01), Wetterhorn
patent: 4552389 (1985-11-01), Babuder et al.
patent: 5000049 (1991-03-01), Cooper et al.

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