Refrigeration – Low pressure cold trap process and apparatus
Patent
1995-01-18
1996-05-21
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
417901, B01D 800
Patent
active
055178235
ABSTRACT:
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
REFERENCES:
patent: 4356701 (1982-11-01), Bartlett et al.
patent: 4555907 (1985-12-01), Bartlett
patent: 4757689 (1988-07-01), Bachler et al.
patent: 4918930 (1990-04-01), Gaudet et al.
patent: 5176004 (1993-01-01), Gaudet
Mundinger, H. J., et al., "Fast Cryopump Regeneration Does More Than Save Time," Semiconductor International, pp. 154-156 (1993, Jul.).
Mundinger, H. J., et al., "A New Cryopump with a Very Fast Regeneration System," Vacuum, pp. 545-549 (1992).
Andeen Bruce R.
Bartlett Allen J.
Eacobacci Michael J.
Fortier Gerald J.
Lessard Philip C.
Capossela Ronald C.
Helix Technology Corporation
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