Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2008-05-06
2008-05-06
Masinick, Michael D. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C417S042000, C417S044100, C700S121000, C700S275000, C700S281000, C137S145000
Reexamination Certificate
active
11387042
ABSTRACT:
A pressure control system for controlling pressure of a fluid in a chamber includes a pressure sensor configured to measure the pressure of the fluid in the chamber, and a valve configured to control the pressure of the fluid in the chamber by regulating flow of the fluid from the chamber. The pressure control system further includes a controller. The controller is configured to estimate the volume of the chamber, and to generate a pump speed curve of the valve. The controller is further configured to monitor and modify the pump speed curve so as to maintain a slope of the pump speed curve to at least a minimum value, and to use the modified pump speed curve to adjust the position of the valve in response to pressure measurements by the pressure sensor, so as to maintain the pressure in the chamber at a desired pressure setpoint.
REFERENCES:
patent: 5480809 (1996-01-01), Salin et al.
patent: 6739840 (2004-05-01), Curry et al.
patent: 6966967 (2005-11-01), Curry et al.
patent: 2004/0013531 (2004-01-01), Curry et al.
Chamberlain Dave
Davidkovich Vladislav
Hill Gordon
Lucas Paul
Masinick Michael D.
McDermott Will & Emery LLP
MKS Instruments Inc.
LandOfFree
Pressure control system with optimized performance does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pressure control system with optimized performance, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure control system with optimized performance will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3951498