Pressure compensation structure for microelectromechanical...

Details Pressure compensation structure for microelectromechanical... Pressure compensation structure for microelectromechanical...

2005-07-01

2009-08-11

Luu, Matthew (Department: 2861)

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C347S068000, C347S065000

Reexamination Certificate

active

07571992

ABSTRACT:
A fluidic micro-electromechanical device includes a pressure compensating subsystem that enables the device to operate consistently in changing environmental pressure conditions. Such a fluidic micro-electromechanical device includes an actuator having an actuator cavity underneath an actuator membrane, the actuator membrane moving in response to a driving signal applied to an actuator electrode, and a pressure compensating chamber coupled to the actuator cavity.

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patent: 2005/0104941 (2005-05-01), Tanaka

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