Metal fusion bonding – With means to juxtapose and bond plural workpieces – Including compliant cushioning medium
Patent
1996-05-20
1997-11-04
Heinrich, Samuel M.
Metal fusion bonding
With means to juxtapose and bond plural workpieces
Including compliant cushioning medium
228447, B23K 3700, B23K 2002, H01L 21603
Patent
active
056830262
ABSTRACT:
A thermocompression-bonding unit and a pressure-bonding head unit which are structurally simple and where reliability is high. The pressure-bonding head unit includes a pressure-bonding head; pressure-bonding head holding means for integrally fixing and holding the pressure-bonding head, the pressure-bonding head holding means being formed with a cutout from a first direction side in parallel with the pressure-bonding surface and also being formed with an opening perpendicular both to the first direction and the pressure-bonding surface; first deformation means for deforming the pressure-bonding head holding means so that a cutout inlet of the cutout opens or closes by a desired amount; and second deformation means for deforming the pressure-bonding head holding means so that one opening end or the other opening end of the opening is crushed in a direction parallel to the first direction by a desired amount. Thus the pressure-bonding unit and the pressure-bonding head unit, which are structurally simple and where reliability is high, can be realized.
REFERENCES:
patent: 4768702 (1988-09-01), Takahashi et al.
patent: 4875614 (1989-10-01), Cipolla et al.
patent: 5150827 (1992-09-01), Fries
Kawatani Norio
Nakayama Hirokazu
Heinrich Samuel M.
Kananen Ronald P.
Sony Corporation
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