Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
Reexamination Certificate
2005-02-22
2005-02-22
Walton, George L. (Department: 3753)
Fluid handling
With cleaner, lubrication added to fluid or liquid sealing...
Cleaning or steam sterilizing
C134S095100, C134S098100, C134S16600C, C134S171000, C137S002000, C137S015040, C137S113000, C137S487500, C137S597000, C222S148000, C700S282000, C702S138000
Reexamination Certificate
active
06857447
ABSTRACT:
Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.
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Donatucci Matthew B.
Olander W. Karl
Wang Luping
Wodjenski Michael J.
Advanced Technology & Materials Inc.
Chappuis Margaret
Hultquist, Esq. Steven
Walton George L.
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