Pressure and temperature sensing element

Details Pressure and temperature sensing element Pressure and temperature sensing element

2007-10-09

2007-10-09

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S727000

Reexamination Certificate

active

11271701

ABSTRACT:
A pressure and sensing element is provided that includes one piezo-resistive sensing element configured as a single light implant square, and may produce outputs relating to both a pressure and temperature that has been sensed. The piezo-sensing element may operate as a piezo-resistive radial element when a constant current is conducted through the element in the radial direction with respect to the diaphragm. Conversely, the piezo-sensing element may operate as a piezo-resistive tangential element when a constant current is conducted through the element in the tangential direction to the edge of the diaphragm. A difference in the radial and tangential resistances and a corresponding difference in voltage drop are proportional to an applied pressure, while a sum of the same two resistances is a function of temperature.

REFERENCES:
patent: 4399707 (1983-08-01), Wamstad
patent: 4539843 (1985-09-01), Wise
patent: 6065346 (2000-05-01), Voegele
patent: 6510742 (2003-01-01), Johnson

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