Pressure-adjusting device for adjusting output of integrated pre

Details Pressure-adjusting device for adjusting output of integrated pre Pressure-adjusting device for adjusting output of integrated pre

1994-12-28

1996-06-18

Walberg, Teresa J.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

338 2, 338 5, 338 42, 437 7, 437226, 73708, 73727, G01L 122

Patent

active

055282148

ABSTRACT:
A pressure-adjusting device for adjusting an output of an integrated pressure sensor in which a silicon wafer is joined onto a seat that has pressure-adjusting passages formed therein, and which has formed in the silicon wafer a signal processing circuit with an adjusting resistor for each chip, a thin diaphragm for each chip and a piezo-resistance layer for each chip. The pressure-adjusting device includes a pressure-setting stage on which the seat is placed, the pressure setting stage having pressure-adjusting passages formed therein to adjust a pressure exerted on the respective thin diaphragm via the pressure-adjusting passages formed in the seat. A holding member is arranged on the pressure-setting stage as to surround at least an outer periphery of the seat. A first elastic air-tight member is arranged on the pressure-setting stage as to surround the outer periphery of the seat and be held compressed by the pressure-setting stage and by the holding member. A second elastic air-tight member is arranged to surround the outer periphery on an upper surface of said silicon wafer or to surround the outer periphery of either the seat or the silicon wafer, and be held compressed by the seat or by the silicon wafer and the holding member.

REFERENCES:
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patent: 4800758 (1989-01-01), Knecht et al.
patent: 4802952 (1989-02-01), Kobori et al.
patent: 4881056 (1989-11-01), Mizukoshi et al.
patent: 5144843 (1992-09-01), Tamura et al.
patent: 5167158 (1992-12-01), Kamachi et al.
patent: 5187985 (1993-02-01), Nelson
patent: 5279164 (1994-01-01), Araki et al.
Journal of Nippondenso Technical Disclosure, Sep. 1990, No. 74-095.

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