Preservation of surface features on semiconductor surfaces

Details Preservation of surface features on semiconductor surfaces Preservation of surface features on semiconductor surfaces

1988-10-21

1990-02-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

357 17, 372 48, 437201, H01L 21208

Patent

active

049026445

ABSTRACT:
The integrity of surface structural features (e.g., distributed feedback gratings) in Group III-V compound semiconductors are preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru or Rh). DFP-DCPBH InP/InGaAsP single frequency lasers made in this way are also described.

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"Investigation of Photoelectro Chemical Corrosion of Semiconductoros", by Frese, Jr. et al., J. Electrochem. Soc. (U.S.A.) vol. 128, No. 9, pp. 1939-1943, Sep. 1981.

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