Preservation of surface features on semiconductor surfaces

Details Preservation of surface features on semiconductor surfaces Preservation of surface features on semiconductor surfaces

1986-03-28

1989-02-14

Sikes, William L.

Coherent light generators

Particular active media

Semiconductor

372 45, 372 48, 372102, 357 16, 357 17, H01S 319

Patent

active

048051780

ABSTRACT:
The integrity of surface structural features (e.g., distributed feedback gratings) in Group III-V compound semiconductors are preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru and Rh). DFB-DCPBH InP/InGaAsP single frequency lasers made in this way are also described.

REFERENCES:
patent: 4273594 (1981-06-01), Heller et al.
patent: 4482423 (1984-11-01), Besomi et al.
patent: 4575851 (1986-03-01), Seki et al.
patent: 4597085 (1986-06-01), Mito et al.

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