Preparation of titanium nitride from organometallic precursors

Details Preparation of titanium nitride from organometallic precursors Preparation of titanium nitride from organometallic precursors

1990-12-10

1992-02-11

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Refractory

423411, 4274197, 4274198, C04B 3558

Patent

active

050875930

ABSTRACT:
A titanium tetrahalide is reacted with at least one disilazane to prepare a titanium-containing organometallic precursor, which is thereafter pyrolyzed to form crystalline titanium nitride.

REFERENCES:
patent: 4482689 (1984-11-01), Haluska
Brown, G. M. et al., "Ammonolysis Products of the Dialkylamides of Titanium, Zirconium, and Niobium as Precursors to Metal Nitrides", J. Am Ceram. Soc., 710778-82 (1988).
Saferth, D. et al., "The Preparation of Titanium Nitride and Titanium Carbonitride by the Preceramic Polymer Route", Gov. Rep. Announce Index (U.S.), V. 88 (1988) 827,109.
Bruger, H. et al., "Uber Titan-Stickstoff-Verbindungen, 2-Mitt," Mh. Chem., Bd. 94 (1963) 761.
Andrivanov, K. A. et al., "Reaction of Hexamethyldisilazane with Aluminum and Titanium Halides Methods of Synthesizing Trialkylhalosilanes," Zh. Obsh. Khim, V. 31, N. 10 (1961) 3,410.

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