Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1990-07-24
1991-12-17
Chaudhuri, Olik
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
422142, C01B 21068
Patent
active
050733583
ABSTRACT:
Silicon nitride powder is prepared by continuously supplying metallic silicon powder to a first fluidized bed which is composed of silicon nitride powder and a non-oxidizing reaction gas containing nitrogen or ammonia gas and maintained at 1,000.degree. to 1,400.degree. C. where primary nitriding reaction takes place, and continuously withdrawing the nitride product from the first fluidized bed and supplying it to a second fluidized bed of similar composition where secondary nitriding reaction takes place for nitriding the unreacted metallic silicon powder.
Fukuhira Masanori
Fukuoka Hirofumi
Shimizu Mutsuo
Chaudhuri Olik
Horton Ken
Shin-Etsu Chemical Co. , Ltd.
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