Preparation of silane from methyldichlorosilane and chlorosilane

Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound

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423342, 556469, C01B 3304, C01B 33107, C07F 708

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046055436

ABSTRACT:
Silane, well adopted as a source of semiconductor/photovoltaic grade silicon, is facilely prepared from methyldichlorosilane and trichlorosilane and/or tetrachlorosilane by, (A) in a first step catalytically redistributing methyldichlorosilane with trichlorosilane or tetrachlorosilane, or admixture thereof, to form methyltrichlorosilane and dichlorosilane, and separating dichlorosilane from the resulting reaction medium, and (B) in a second step, catalytically disproportionating the dichlorosilane thus separated to form silane and trichlorosilane, and thence recovering silane thus formed and optionally recycling trichlorosilane to said step (A).

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Specialty Chem. Products Corporation Catalogue 5/25/84.

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