Preparation of fused silica glass by hydrolysis of methyl silica

Details Preparation of fused silica glass by hydrolysis of methyl silica Preparation of fused silica glass by hydrolysis of methyl silica

1989-09-08

1990-12-25

Lacey, David L.

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

65900, 65901, 501 12, C03B 802

Patent

active

049799738

ABSTRACT:
The invention provides a method for the preparation of synthetic fused silica glass containing a very small amount of hydroxyl groups and has a high viscosity at high temperatures suitable for use as a material of articles for semiconductor processing at high temperatures, such as a crucible for Czochralski single crystal growing of semiconductor silicon. The method comprises hydrolyzing methyl silicate in a medium containing a specified amount of ammonia as a hydrolysis catalyst to form silica particles which are heat-treated in several successive steps.

REFERENCES:
patent: 3597252 (1971-08-01), Schroder et al.
patent: 4266978 (1981-05-01), Prochazha
patent: 4500657 (1985-02-01), Kumar
patent: 4572729 (1986-02-01), Lang et al.
patent: 4747863 (1988-05-01), Claser et al.
patent: 4767433 (1988-08-01), Iura et al.

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