Preparation of diisopropyl stibines and use thereof

Details Preparation of diisopropyl stibines and use thereof Preparation of diisopropyl stibines and use thereof

1993-11-30

1994-12-06

Shaver, Paul F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

427252, C07F 990, C23C 1600

Patent

active

053712579

ABSTRACT:
The new compound diisopropyl stibine is prepared by reacting an diisopropyl antimony halide with a hydride or deuteride transferring agent. The reaction is preferably carried out below about 0.degree. C., in an inert atmosphere, under darkened conditions. The diisopropyl stibine is used as a precursor in forming antimony-containing semiconductor material by chemical vapor deposition.

REFERENCES:
Gedridge, Jr. et al., Chem. Mater., vol. 5, No.7, pp.979-982 (1993).
Shin et al., Journal of Crystal Growth, vol. 132, No. 3/4, pp. 371-376 (1993).

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