Chemistry of inorganic compounds – Nitrogen or compound thereof – Binary compound
Patent
1989-03-16
1994-10-18
Miller, Edward A.
Chemistry of inorganic compounds
Nitrogen or compound thereof
Binary compound
4272552, 501 96, C01B 21072
Patent
active
053566084
ABSTRACT:
A process and apparatus for making high purity aluminum nitride from organometallic aluminum, such as an alkylaluminum compound. A gaseous alkylaluminum compound and gaseous ammonia are introduced into a heated reaction zone where the gases are mixed and high purity aluminum nitride is produced. The high purity aluminum nitride is collected in the form of a powder or deposited as a thick, dense layer on an appropriate substrate mounted in the reaction chamber. A carrier gas such as hydrogen gas, may be used to conduct the alkylaluminum compound from a suitable reservoir containing liquid alkylaluminum compound to the reaction chamber. A preferred alkylaluminum compound is triethylaluminum.
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Berard Jr. Clement A.
Krauss Geoffrey H.
Martin Marietta Corporation
Meise William H.
Miller Edward A.
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