Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Havin growth from molten state
Reexamination Certificate
2005-02-15
2005-02-15
Norton, Nadine G. (Department: 1765)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Havin growth from molten state
C117S940000
Reexamination Certificate
active
06855203
ABSTRACT:
The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride, which comprises: loading a crucible with a barium fluoride starting material crystal feedstock which contains at least one oxide as impurity, and an effective and non-excess amount of at least one fluorinating agent which is solid at ambient temperature, melting said mixture within said crucible, growing the crystal, by controlled cooling of the molten mixture, controlled cooling of said crystal to ambient temperature, recovering said crystal; and which is characterized in that the oxide(s) resulting from the reaction between said fluorinating agent(s) and said oxide(s), the impurity or impurities, can be discharged from said crucible, in view of the intrinsic permeability of the material constituting it. Said process is particularly adapted for preparing 157 nm transmitting lithography excimer laser optical fluoride crystals in graphite crucibles.
REFERENCES:
patent: 5476679 (1995-12-01), Lewis et al.
patent: 5656077 (1997-08-01), Kawase
patent: 5911824 (1999-06-01), Hammond et al.
patent: 6061174 (2000-05-01), Shiozawa et al.
patent: 6093245 (2000-07-01), Hammond et al.
patent: 6096245 (2000-08-01), Tanigaki et al.
patent: 6123764 (2000-09-01), Mizugaki et al.
patent: 6200385 (2001-03-01), Swinchart
patent: 6201634 (2001-03-01), Sakuma et al.
patent: 6375551 (2002-04-01), Darcangelo et al.
patent: 6669778 (2003-12-01), Meyer-Fredholm
patent: 6669920 (2003-12-01), Sparrow
patent: 20030217688 (2003-11-01), Meyer-Fredholm et al.
patent: 20040089223 (2004-05-01), Meyer-Fredholm et al.
patent: 0 919 646 (1999-06-01), None
patent: 0 995 820 (2000-04-01), None
patent: 10-279396 (1998-10-01), None
patent: 10-330192 (1998-12-01), None
patent: 2000-211999 (2000-08-01), None
patent: WO 02079550 (2002-10-01), None
Meyer-Fredholm Michele M. L.
Pell Michael A.
Anderson Matthew
Corning Incorporated
Douglas Walter M.
Norton Nadine G.
LandOfFree
Preparation of 157nm transmitting barium fluoride crystals... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Preparation of 157nm transmitting barium fluoride crystals..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Preparation of 157nm transmitting barium fluoride crystals... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3468281