Prediction method and apparatus of a processing result

Details Prediction method and apparatus of a processing result Prediction method and apparatus of a processing result

2006-11-21

2006-11-21

Patel, Ramesh (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

C700S121000, C700S146000, C700S038000, C118S063000, C118S712000, C118S713000, C118S714000, C356S072000, C702S030000, C702S019000

Reexamination Certificate

active

07139620

ABSTRACT:
In a method and apparatus for predicting process results of objects being processed in a processing chamber of a processing apparatus, operation data and process result data obtained at the time of processing each of the objects are collected and a multivariate analysis is performed on the basis of the collected operation data and process result data to obtain a first correlation therebetween. Process results are predicted on the basis of the first correlation. Weighting coefficients for the respective operation data are set on the basis of the predicted process results. A second correlation between the weighted operation data and the process result data is obtained by a multivariate analysis. Process results are predicted by using operation data, obtained when objects other than the objects used to obtain the second correlation are processed, on the basis of the second correlation.

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