Optics: measuring and testing – By light interference – Having light beams of different frequencies
Reexamination Certificate
2008-04-29
2008-04-29
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
Having light beams of different frequencies
Reexamination Certificate
active
07365857
ABSTRACT:
Apparatus and methods for adjusting the polarizations of the components of an input beam to reduce leakage caused by imperfections in an interferometer are disclosed. The apparatus includes an interferometer positioned to receive an input beam that includes two components having different frequencies and different polarizations, the interferometer including a polarizing beam splitter positioned to spatially separate the input beam into two intermediate beams, the first intermediate beam corresponding to the first component and the second intermediate beam corresponding to the second component, where imperfections in the interferometer cause leakage of one of the components into the intermediate beam corresponding to the other of the components. The apparatus further includes a polarization compensator that includes at least one retardation plate positioned to adjust the polarizations of the components of the input beam to reduce the leakage caused by the imperfections in the interferometer.
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Carlson Andrew Eric
Holmes Michael Lowell
Connolly Patrick
Fish & Richardson P.C.
Zygo Corporation
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