Precision thickness variation mapping via one-transducer ultraso

Details Precision thickness variation mapping via one-transducer ultraso Precision thickness variation mapping via one-transducer ultraso

1996-04-22

1997-12-23

Williams, Hezron E.

Measuring and testing

Vibration

By mechanical waves

73602, 73620, 73627, 73663, 364563, G01H 500

Patent

active

057009554

ABSTRACT:
An apparatus and method for determination of sample thickness and surface depression utilizing ultrasonic pulses. The sample is held in a predetermined position by a support member having a reference surface. Ultrasonic pulses travel through a medium of known velocity propagation and reflect off the reference surface and a sample surface. Time of flight data of surface echoes are converted to distances between sample surfaces to obtain computer-generated thickness profiles and surface mappings.

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