Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-10-24
1999-02-09
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
355 30, G01B 902
Patent
active
058701974
ABSTRACT:
A local air duct directs a temperature-controlled stream of air across two perpendicular sets of interferometer beams which are used to measure the two dimension (X-Y) position of a precision stage in e.g. an optical lithography stepper or step and scan system, or in any other precision coordinate measuring machine. By thereby providing an additional single air flow which is azimuthally directed across both the X and Y direction interferometer beams, the precision of the interferometric measurement is maximized. In addition, a second flow of air is directed downwards from the local air duct, thus providing sufficient air circulation onto the stage when the stage is directly beneath the local duct, even though in that location the stage is otherwise blocked from receiving the main air flow through the chamber.
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Eaton John K.
Kobayashi Naoyuki
Sogard Michael R.
Suwa Kyoichi
Klivans Norman R.
Nikon Corporation
Turner Samuel A.
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