Precision positioning apparatus

Details Precision positioning apparatus Precision positioning apparatus

1993-03-01

1996-04-30

Huppert, Michael S.

Material or article handling

Article supported by air and moved by mechanical or manual...

364508, 356358, 356363, G01M 700

Patent

active

055119301

ABSTRACT:
A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.

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