Precision polishing method using hermetically sealed chambers

Details Precision polishing method using hermetically sealed chambers Precision polishing method using hermetically sealed chambers

1999-05-04

2000-11-21

Eley, Timothy V.

Abrading

Abrading process

Glass or stone abrading

451 67, 451451, B24B 100, B24B 5500

Patent

active

06149500&

ABSTRACT:
A precision polishing apparatus has a first hermetically sealed chamber provided with polishing means, a third hermetically sealed chamber capable of communicating with the first hermetically sealed chamber through a second hermetically sealed chamber, first and second opening-closing means for alternately placing the first and the third hermetically sealed chamber in communication with the second hermetically sealed chamber, and atmosphere pressure control means for controlling the atmosphere pressure of the first and the second hermetically sealed chamber so that the atmosphere pressure of the first hermetically sealed chamber may become lower than the atmosphere pressure of the second hermetically sealed chamber when at least the first opening-closing means is opened.

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Patent Abstracts of Japan, vol. 018, No. 507 (E-1609), Sep. 22, 1994 & JP 06 177060 A (Kokusai Electric Co Ltd), Jun. 24, 1994.

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