Precision polar coordinate stage

Details Precision polar coordinate stage Precision polar coordinate stage

2005-06-28

2005-06-28

Lillis, Eileen D. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S749100, C414S749600, C414S751100, C414S752100

Reexamination Certificate

active

06910847

ABSTRACT:
A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stage can include a linkage of arms to support and drive the linear motion of the chuck. The chuck is coupled to a horizontal rail such that rotational motion of a first arm is translated into precise linear motion of the chuck along the horizontal rail through a second arm. In addition, a system of pulleys within the arms translates rotational (or linear) motion through the arms and rotates the chuck. Vertical motion may be provided by an actuator between the second arm and the chuck or by a motor under the stage. Because of the compact nature of the stage, it can be easily placed within a chamber.

REFERENCES:
patent: 4449884 (1984-05-01), Motoda
patent: 4897015 (1990-01-01), Abbe et al.
patent: 5456561 (1995-10-01), Poduje et al.
patent: 5743705 (1998-04-01), Eissfeller
patent: 6068442 (2000-05-01), Flemmer et al.
patent: 6752580 (2004-06-01), Soraoka et al.

Affiliated with

Also associated with

Rating

Precision polar coordinate stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Precision polar coordinate stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Precision polar coordinate stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3516019