Precision optical displacement measurement system

Details Precision optical displacement measurement system Precision optical displacement measurement system

1997-03-19

1998-04-07

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

356372, 356237, 356380, 356373, 356375, G01B 1124

Patent

active

057370850

ABSTRACT:
Apparatus and method for measuring the relative distance between different areas on a remote surface or displacements of a selected area of a remote surface with respect to a measuring apparatus are provided. A laser beam is modulated at an RF frequency and focused on a selected area. The selected area is scanned by movement of a mirror and at each selected area the phase difference is measured. Digital data processing of signals derived from the source and return beams is used to provide high precision. For detecting or measuring vibration or displacement, an analog signal is obtained from a low-pass filter.

REFERENCES:
patent: 5442172 (1995-08-01), Chang et al.

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