Abrading – Machine – Scouring device
Patent
1995-03-13
1997-01-07
Eley, Timothy V.
Abrading
Machine
Scouring device
451111, 451113, 451115, 451527, B24B 3100
Patent
active
055910688
ABSTRACT:
A non-contact polishing tool that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required.
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Y. Mori et al, Mechanism of Atomic Removal in Elastic Emission Machining, Precision Engineering, Jan. 1988, vol. 10, No. 1, pp. 24-28.
P. C. Baker, Advanced Flow-Polishing of Exotic Optical Materials, SPIE, vol. 1160, X-Ray/EUV Optics, 1989, pp. 263-270.
J. M. Bennett et al, Float Polishing of Optical Materials, Applied Optics/vol. 26, No. 4/15 Feb. 1987, pp. 696-702.
AMMTRA Brochure, Advanced Material Processing & Machining Unveiling The Technology Of The 21st Century, 1991.
Carnahan L. E.
Eley Timothy V.
Regents of the University of California
Sartorio Henry P.
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