Precision multi-dimensional capacitive transducer

Details Precision multi-dimensional capacitive transducer Precision multi-dimensional capacitive transducer

2007-09-04

2007-09-04

Cygan, Michael (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified load or strain transmission device from specimen...

Reexamination Certificate

active

10996146

ABSTRACT:
A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pick-up plate and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.

REFERENCES:
patent: 5576483 (1996-11-01), Bonin
patent: 6026677 (2000-02-01), Bonin
patent: 6820493 (2004-11-01), Bonin

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