Precision machining method, precision machining apparatus and da

Details Precision machining method, precision machining apparatus and da Precision machining method, precision machining apparatus and da

1993-09-14

1995-11-28

Anderson, Bruce C.

Radiant energy

Luminophor irradiation

H01J 3730

Patent

active

054710642

ABSTRACT:
A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.

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