Precision laser machining apparatus

Details Precision laser machining apparatus Precision laser machining apparatus

2008-12-19

2010-06-22

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S201100, C359S209100, C219S121750, C219S121780, C219S121800

Reexamination Certificate

active

07742212

ABSTRACT:
A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.

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