Precision laser machining apparatus

Details Precision laser machining apparatus Precision laser machining apparatus

2007-02-14

2009-02-10

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S209100

Reexamination Certificate

active

07489429

ABSTRACT:
A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.

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patent: 4940881 (1990-07-01), Sheets
patent: 5626778 (1997-05-01), Freedenberg et al.
patent: 6501045 (2002-12-01), Bernstein et al.

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