Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Patent
1993-08-30
1995-06-06
Valentine, Donald R.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating selected area
205134, 205135, 205143, 205255, 205238, 204212, 204224R, 204297R, C25D 356, C25D 508, C25D 502, C25D 700
Patent
active
054219876
ABSTRACT:
A precision high rate electroplating cell comprising a rotating anode/jet assembly (RAJA) immersed in the electrolyte and having high pressure electrolyte jets aimed at the substrate (cathode). The high pressure jets facilitate efficient turbulent agitation at the substrate's surface, even when it consists of complex shapes or mask patterns. High aspect ratio areas receive similar degree of agitation (and replenishment) as areas of lower aspect ratios. As a result, thickness and composition micro-uniformities are substantially improved while utilizing significantly higher current densities and plating rates.
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Michael Matlosz, "Competitive Adsorption Effects in the Electrodeposition of Iron-Nickel Alloys", J. Electrochem. Soc., vol. 140, No. 8, Aug. 1993, pp. 2272-2279.
P. C. Andricacos et al., "Electrodeposition of Nickel-Iron Alloys", J. Electrochem. Soc., vol. 136, No. 5, May 1989, pp. 1336-1340.
Cohen Uri
Tzanavaras George
Steuber David E.
Valentine Donald R.
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