Precision-controlled slit mechanism for electron microscope

Details Precision-controlled slit mechanism for electron microscope Precision-controlled slit mechanism for electron microscope

1995-08-25

1997-06-17

Berman, Jack I.

Radiant energy

Electron energy analysis

250311, H01J 4944

Patent

active

056400128

ABSTRACT:
A precision-controlled slit mechanism having an adjustable width which is both accurate and reproducible is provided for apparatuses which are designed to exclude portions of an energy spectrum prior to analysis such as energy-selected imaging filters in electron microscopes. The slit mechanism includes a pair of slit halves, a light source for directing light between the slit halves, a detector for measuring the intensity of light passing from the light source through the slit halves, and an actuator for adjusting the width of the opening between the slit halves in response to the intensity of light measured by the detector.

REFERENCES:
patent: 4017403 (1977-04-01), Freeman
patent: 4789780 (1988-12-01), Le Poole et al.
patent: 4851670 (1989-07-01), Krivanek
patent: 5065029 (1991-11-01), Krivanek
patent: 5282075 (1994-01-01), Sugimori
patent: 5381010 (1995-01-01), Gordon
patent: 5400170 (1995-03-01), Hanada
Pages 177-179 from Circuits, Devices, and Systems, A First Course in Electrical Engineering, Third Edition, by Ralph J. Smith, has no date.

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