Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1995-10-27
1998-01-13
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
3613213, 257301, H01G 420, H01G 406
Patent
active
057085595
ABSTRACT:
A precision analog metal-metal capacitor is fabricated by forming a first capacitor plate in an insulation layer by forming a trench therein, depositing metal within the trench and planarizing the device. A thin dielectric layer is then deposited and patterned over the first capacitor plate. A second insulator is then deposited over the device and discrete openings etched therein to expose the insulation layer and first metal plate. Metal is deposited within the openings and planarized, thereby forming a contact to the first metal plate and the second metal plate of the capacitor.
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Brabazon Terry J.
El-Kareh Badih
Kaanta Carter W.
Martin Stuart R.
Rutten Matthew J.
International Business Machines - Corporation
Ledynh Bot L.
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