Precise thermal processing apparatus

Details Precise thermal processing apparatus Precise thermal processing apparatus

1979-03-16

1980-04-01

Edmundson, F. C.

Metallurgical apparatus

With control means responsive to sensed condition

With temperature sensor

13 25, 13 31R, 219390, 266 78, 266250, C21D 134, C21D 174

Patent

active

041958209

ABSTRACT:
Disclosed is apparatus for subjecting a workpiece to a controlled temperature comprising a light-weight muffle of high diffusivity material having an interior high emissivity surface, an air cooled envelope surrounding the muffle having an infrared reflective interior surface, and a housing which maintains a vacuum in the space outside of the muffle. Heaters and temperature sensors are spaced about the muffle. The heaters are controlled by an electronic feedback control system which actuates the heaters in response to signals received from the temperature sensors. The apparatus is ideally suited for use in the controlled diffusion processing techniques employed in the fabrication of electronic devices because it applies on the order of 90% of the generated heat to the workpiece, can be rapidly heated up and cooled, and can maintain a selected temperature within narrow limits.

REFERENCES:
patent: 2375154 (1945-05-01), Volterra
patent: 3038987 (1962-06-01), Dow et al.
patent: 3160404 (1964-12-01), Potenzo et al.
patent: 3240915 (1966-03-01), Carter et al.
patent: 3260783 (1966-07-01), Potenzo et al.
patent: 3626154 (1971-12-01), Reed
patent: 3736360 (1973-05-01), Bergman et al.
patent: 3737553 (1973-06-01), Kreider et al.
patent: 3846574 (1974-11-01), Rordorf

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