Precise positioning apparatus

Details Precise positioning apparatus Precise positioning apparatus

2005-03-16

2010-06-29

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S348000

Reexamination Certificate

active

07745972

ABSTRACT:
A precision positioning device1having degrees of freedom along multi-axial directions includes a single unitary structure2and a plurality of expansion/contraction actuators4a,4b, and4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure2as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators4a,4b, and4cincorporated in the unitary structure2. The expansion/contraction actuators4a,4b, and4ccan be formed of piezoelectric elements.

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