Prebaking treatment for resist mask composition and mask making

Details Prebaking treatment for resist mask composition and mask making Prebaking treatment for resist mask composition and mask making

1976-12-20

1978-05-02

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 351, 96 362, 96115R, 427273, 427372R, B05D 306

Patent

active

040875695

ABSTRACT:
Polymethyl methacrylate methacrylic acid (P[MMA/MAA]) copolymer powder is prebaked above 200.degree. C. The prebaked powder is dissolved in a suitable casting solvent. The insoluble material produced during prebaking is removed by filtration. Then the solution remaining is applied to a substrate, post-baked at a temperature less than or equal to the prebaking temperature to drive off the solvent, exposed to electron beam radiation, and developed in a developing solvent.

REFERENCES:
patent: 3594243 (1971-07-01), Deutsch et al.
patent: 3706703 (1972-12-01), Heilman
patent: 3914462 (1975-10-01), Morishita et al.
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 3984582 (1976-10-01), Feder et al.
IBM Tech. Disclosure Bulletin, vol. 18, No. 8, Jan. 1976, Bargon et al., p. 2622.
IBM Tech. Disclosure Bulletin, vol. 19, No. 4, Sep. 1976, Bargon, p. 1402.

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