Prealigner and planarity teaching station

Details Prealigner and planarity teaching station Prealigner and planarity teaching station

1998-05-11

2000-07-04

Ellis, Christopher P.

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

414222, 4147441, 901 3, 901 9, 901 16, 901 30, B25J 900

Patent

active

060851252

ABSTRACT:
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station. The adjustment of the substrate or end effector plane allows substrates to be removed from and delivered to various cassettes and workstations of a substrate processing system without damage to the substrate caused by end effector misalignment.

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patent: 5810935 (1998-09-01), Lee et al.
patent: 5822498 (1998-10-01), Kumasa et al.

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