Power transfer network

Details Power transfer network Power transfer network

1978-09-26

1981-08-18

Gantz, Delbert E.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

333 32, 315254, 315276, C23C 1500

Patent

active

042844894

ABSTRACT:
A power transfer network for efficiently coupling a source of high frequency energy to a physically large dimensioned electrode system in a sputtering machine which exhibits high spray capacitance to ground. The network includes an inductive element capable of being tapped along its length such as a linear line section and a tuning capacitor with the source of high frequency energy in the megahertz range, each of the source and the electrode system being connectively tapped into a suitable location along the inductive element.

REFERENCES:
patent: 2665339 (1954-01-01), Leng
patent: 2756393 (1956-07-01), Moulton
patent: 3436333 (1969-04-01), Beaudry
patent: 3569777 (1971-03-01), Beaudry
patent: 3704219 (1972-11-01), McDowell
patent: 3767551 (1973-10-01), Lang, Jr. et al.
patent: 3803019 (1974-04-01), Robinson et al.
patent: 3849283 (1974-11-01), Jackson et al.
patent: 3892650 (1975-07-01), Cuomo et al.
Frederick E. Terman, Radio Engineers Handbook, McGraw-Hill Book Co., Inc., New York, 1943, p. 148.

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