Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1992-08-11
1993-06-01
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118715, C23C 1424
Patent
active
052155900
ABSTRACT:
Transformers (5, 6) are bolted underneath power feeders (4) and each directly connected by a mounting piece (16, 16a) against an outside wall (19) of a tank (1) containing evaporator boats for metal vapor deposition. These mounting pieces (16, 16a) are electrically connected each to a pole of the secondary winding of each transformer (5, 6) so that a direct contacting of the tank with this pole achieved.
REFERENCES:
patent: 2584660 (1952-02-01), Bancroft
patent: 2637298 (1953-05-01), Shapiro
patent: 2996418 (1961-08-01), Bleil
patent: 4217855 (1980-08-01), Takagi
Bueker Richard
Leybold Aktiengesellschaft
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