Power supply, a semiconductor making apparatus and a...

Details Power supply, a semiconductor making apparatus and a... Power supply, a semiconductor making apparatus and a...

2006-10-24

2006-10-24

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

With measuring or testing

C438S019000, C438S017000

Reexamination Certificate

active

07125730

ABSTRACT:
In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.

REFERENCES:
patent: 6652710 (2003-11-01), Cruse
patent: 5121468 (1993-05-01), None
patent: 6104248 (1994-04-01), None
patent: 2001-004676 (2001-01-01), None
patent: 2001-035345 (2001-02-01), None

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