Electric lamp and discharge devices: systems – With cathode or cathode heater supply circuit – Pulsating or a.c. supply to the cathode or heater circuit
Patent
1982-06-09
1984-06-12
LaRoche, Eugene R.
Electric lamp and discharge devices: systems
With cathode or cathode heater supply circuit
Pulsating or a.c. supply to the cathode or heater circuit
315101, 31511181, 315147, 315175, 3151691, 315 98, 315307, 315350, H05B 4136, H01J 2702
Patent
active
044544537
ABSTRACT:
The invention provides a power source device for an ion source, including first to third power source units coupled to the anode, the cathode and the beam extraction electrode of the ion source. The second power source unit applies an alternating voltage across the cathode. An alternating heating current then flows through the cathode. Each cycle of the alternating voltage from the second power source unit has positive and negative components with preset levels which are generated with a predetermined time interval between them. The power source device further includes a control circuit for interrupting the operation of the first and third power source units during the predetermined time interval.
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patent: 3909663 (1975-09-01), Thomas et al.
patent: 3952228 (1976-04-01), Reader et al.
patent: 4253048 (1981-02-01), Osako
patent: 4317983 (1982-03-01), Scheffels et al.
K. W. Ehlers et al.; "Design and Operation of an Intense Neutral Beam Source" J. Vac. Sci. Technol. 10, 922-925 (1973).
K. W. Ehlers and K. N. Leung; "Some Characteristics of Tungsten Filaments Operated as Cathodes in a Gas Discharge"; Rev. Sci. Instrum. 50, 356-361 (1979).
United Kingdom Atomic Energy Authority Research Rpt., K. J. Hill et al., "The Harwell.RTM. Sputtered Ion Gun," Mar. 1970, p. 2, line 36; p. 3, line 8; p. 3, lines 28-32; FIG. 3.
Nuclear Instruments and Methods, vol. 38, K. J. Hill et al., "A Sputtering Ion Source," Dec. 1965; p. 15, right-hand column, line 31; p. 17, left-hand column, line 1; FIG. 3.
The Review of Scientific Instruments, vol. 30, No. 5, M. Abele et al., "Design and Performance of a Hot Cathode Magnetically Collimated Arc Discharge Ion Source," May 1959, p. 336, right-hand column, line 34; p. 337, left-hand column, line 2; p. 337, right-hand col., lines 14-25; FIG. 2.
De Luca Vincent
LaRoche Eugene R.
Tokyo Shibaura Denki Kabushiki Kaisha
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