Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With waveguide or long line
Patent
1988-02-19
1988-12-06
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With waveguide or long line
324106, 357 28, G01R 2102, G01R 2100
Patent
active
047898232
ABSTRACT:
In a power sensor for RF power measurments, comprising a thin-film absorbing resistor formed on the top surface of a support member and a thermocouple which is electrically isolated from the circuit of said absorbing resistor, the absorbing resistor is formed on an insulating film of a silicon support member so as to increase the sensitivity and to facilitate manufacture thereof, the silicon support member including an island formed beneath the absorbing resistor, a thermally conducting portion formed in spaced relationship thereto with a narrow bridge portion provided inbetween, and said thermocouple being constituted by the bridge portion and by mutually spaced contact zones formed thereon.
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"High Sensitivity Miniature-Sized Microwave-Power Monitor", by Yoko et al., Elect. Letters, 2/76, vol. 12, #3, cl. 324-106; pp. 67-68.
"Temperature Range of Silicon Sensors Tops 350.degree. C. mark", by Gosch, Electronics, 5/5/82, vol. 55, #9, pp. 73-74, cl. 357-28.
"A Thin-Film/Semi-conductor Thermocouple for Microwave Power Measurements", by Jackson, HP Journal, 9/74, pp.16-18.
Betz Tilman
Delfs Hans
Burns W.
Eisenzopf Reinhard J.
Rohde & Schwarz GmbH & Co. KG
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