Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...
Patent
1995-11-21
1998-03-31
Jordan, Charles T.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
With means applying electromagnetic wave energy or...
422907, 118723R, 118723E, B01J 1908
Patent
active
057335117
ABSTRACT:
A multiple electrode plasma reactor power splitter and delivery system to provide balanced power to a plurality of powered electrodes by utilizing the properties of quarter wave length transmission lines. Each electrode is supplied power by a separate (2N+1).lambda./4 wavelength cable, where N=0,1,2 . . . , connected to a common point at a load matching network's output. The impedance transformation properties of these lines are also employed to convert the plasma load to one that is more efficiently matched into by a standard network. Also disclosed is a technique of splitting a single large active electrode into smaller active electrodes powered by the above distribution scheme in order to achieve maximum uniformity of the reactive plasma throughout the working volume.
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Technology Topics, "Sputter Etch Using RF Rotary Planetary Tooling".
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Draegert David A.
Jenkins Daniel
Jordan Charles T.
Pace Salvatore P.
The BOC Group Inc.
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